An Extreme Ultraviolet Lithography?

An Extreme Ultraviolet Lithography?

Extreme ultraviolet lithography, or EUV, is a type of optical lithography used in the fabrication of semiconductor devices. This technology uses extremely short pulses of light to create high-resolution patterns on a wafer. These patterns are then etched into the substrate to form an integrated circuit. Table of content: Example of source-mark optimization For example, […]